JPH0213460B2 - - Google Patents

Info

Publication number
JPH0213460B2
JPH0213460B2 JP55060246A JP6024680A JPH0213460B2 JP H0213460 B2 JPH0213460 B2 JP H0213460B2 JP 55060246 A JP55060246 A JP 55060246A JP 6024680 A JP6024680 A JP 6024680A JP H0213460 B2 JPH0213460 B2 JP H0213460B2
Authority
JP
Japan
Prior art keywords
region
mask
oxidation
forming
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55060246A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56157042A (en
Inventor
Shigeo Shibata
Hirohiko Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6024680A priority Critical patent/JPS56157042A/ja
Publication of JPS56157042A publication Critical patent/JPS56157042A/ja
Publication of JPH0213460B2 publication Critical patent/JPH0213460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
JP6024680A 1980-05-06 1980-05-06 Manufacture of semiconductor device Granted JPS56157042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6024680A JPS56157042A (en) 1980-05-06 1980-05-06 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6024680A JPS56157042A (en) 1980-05-06 1980-05-06 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56157042A JPS56157042A (en) 1981-12-04
JPH0213460B2 true JPH0213460B2 (en]) 1990-04-04

Family

ID=13136619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6024680A Granted JPS56157042A (en) 1980-05-06 1980-05-06 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56157042A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835970A (ja) * 1981-08-28 1983-03-02 Fujitsu Ltd 半導体装置の製造方法
JPS6038873A (ja) * 1983-08-11 1985-02-28 Rohm Co Ltd 半導体装置の製造方法
DE3545244A1 (de) * 1985-12-20 1987-06-25 Licentia Gmbh Strukturierter halbleiterkoerper

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838936B2 (ja) * 1975-12-11 1983-08-26 日本電気株式会社 ハンドウタイシユウセキカイロソウチ
JPS5353254A (en) * 1976-10-26 1978-05-15 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
JPS56157042A (en) 1981-12-04

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